Operating Principle | Photoionization Detection (PID)
Photoionization Detection
PID Photoionization Detection Technology Overview
The AST1000 PID Intelligent Fixed Gas Detector is a high-performance gas detector designed specifically for the semiconductor industry and other general industrial environments, featuringPhotoionization Detection (PID)Used to detect toxic and harmful gases containing organic volatile compounds.
Product Features
Built-in multi-level security
Level 1 and Level 2 alarm & fault relays for comprehensive safety protection
Extend shelf life
Includes a 2-year extended warranty to reduce maintenance costs.
Dual LCD Display
Main screen 2.8 + Secondary screen 0.9: Clear, intuitive dashboard-style interface
Power over Ethernet (PoE)
Supports PoE for simplified cabling and reduced installation costs
II. Product Appearance and Dimensions
4R-compatible sensor size
III. Gas Type to Detect
AST InteliCal® Smart Sensor Module supports detection of multiple semiconductor process gases:
| Gas Name | Molecular Formula | Range | Sensor Type |
|---|---|---|---|
| Trimethylsilane | Si(CH₃)₃H (TMS) | 0-15 ppm | 4R Compatible |
| Triethyl phosphate | TEPO | 0-2 ppm | 4R Compatible |
| Triethylborane | TEB | 0-1000 ppm | 4R Compatible |
| Trimethylaluminum | TMA | 0-15 ppm | 4R Compatible |
| Trimethylsilylamine | TSA | 0-15 ppm | 4R Compatible |
| diisopropylaminosilane | LTO520 | 0-15 ppm | 4R Compatible |
| Titanium(IV) trimethoxy pentamethylcyclopentadienyl | NxTi | 0-2000 ppm | 4R Compatible |
| Zirconium acetate | ZAC | 0-15 ppm | 4R Compatible |
| Germanium tetrafluoride | GeF₄ | 0-1.5 ppm | 4R Compatible |
| Titanium(IV) dimethylamino | TDMAT | 0-15 ppm | 4R Compatible |
| Tetrakis(dimethylamino)hafnium | TDMAH | 0-15 ppm | 4R Compatible |
For more gas options, please contact Sensirion.